On the applicability of different methods of XRD line profiles analysis in estimating grain size and microstrain in tungsten thin films

Đerđ, Igor and Tonejc, Anđelka and Tonejc, Antun and Radić, Nikola (2006) On the applicability of different methods of XRD line profiles analysis in estimating grain size and microstrain in tungsten thin films. Fizika A, 15 (1). pp. 35-50. ISSN 1330-0008

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Abstract

Different methods of X-ray diffraction line profile analysis (XRDLPA) are used to study microstructural parameters such as crystallite size (diffracted domain size), microstrain and texture in tungsten thin films deposited on glass by DC magnetron sputtering at different substrate temperatures and at different working-gas pressures. The whole-pattern analysis within the Rietveld method, the "single-line" method and "double Voigt" method (equivalent to the Warren-Averbach method) are applied and mutually compared. In addition, the results obtained by the Scherrer method are also discussed. The line broadening has been found to be isotropic, supporting the reliability of usage of the Rietveld method in the size-microstrain extraction.

Item Type: Article
Keywords: tungsten thin film, X-ray diffraction, grain size, microstrains
Date: 2006
Subjects: NATURAL SCIENCES > Physics
Divisions: Faculty of Science > Department of Physics
Publisher: Hrvatsko fizikalno društvo
Depositing User: Gordana Stubičan Ladešić
Date Deposited: 15 Apr 2014 17:53
Last Modified: 15 Apr 2014 17:53
URI: http://digre.pmf.unizg.hr/id/eprint/862

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